LiQuilaz® II S02 Liquid Particle Counter

Volumetric particle monitoring from 0.2 to 2.0 µm

The LiQuilaz® II S02 from Particle Measuring Systems is a volumetric optical particle counter designed for high-purity liquids and process chemicals. Its 0.2 to 2.0 µm measurement range makes it suitable for applications that require detection of very small particles in deionized water, photoresist, chemical delivery systems, process baths, and precision-component cleaning fluids. The instrument can be configured with one to fifteen user-adjustable particle-size channels, allowing the measurement program to focus on the thresholds that matter to a specific process.

LiQuilaz II instruments analyze 100% of the sample volume passing through the illuminated capillary. This is different from partial-flow optical designs that observe only a portion of the liquid stream. Full-volume measurement can provide statistically useful data within shorter sampling intervals, particularly when particle concentrations are low. It does not, however, remove the need for a controlled sampling procedure. Bubbles, contaminated tubing, unstable flow, excessive particle concentration, and incompatible wetted materials can still create misleading results.

Online and syringe-sampling configurations

The S02 has two important flow configurations. For online or in-line use, the nominal flow rate is 50 mL/min with a ±10% tolerance. This configuration can provide near-real-time visibility into process changes, filter performance, chemical delivery events, and contamination excursions. For sampler applications, a 20 mL/min configuration with a ±10% tolerance is available. A syringe liquid sampler—translated in this article as “bộ lấy mẫu bằng xi lanh định lượng”—draws and dispenses a controlled liquid volume through the particle counter. This arrangement is useful for bottle samples, batch testing, expensive chemicals, and laboratory investigations where continuous installation is not practical.

Chemical compatibility and operating limits

Published PMS specifications list a recommended maximum concentration of 10,000 particles/mL, a zero count below 25 particles/L, a sample pressure range of 0 to 100 psi, and a sample temperature range of 0 to 150 °C. Wetted materials include sapphire, Teflon®, Kalrez® 4079, and Kel-F®. The broad published limits should not be treated as universal approval for every chemical. Concentration, temperature, pressure, viscosity, gas release, tubing, fittings, and the complete wetted path must be reviewed for each application. PMS identifies the S-Series for many process chemicals, including hydrofluoric acid and hot corrosive liquids, subject to correct configuration.

Applications and model selection

Typical S02 applications include chemical quality assurance, deionized-water monitoring, photoresist monitoring, process-bath control, chemical distribution systems, and component cleanliness testing. The S02 should be selected when sensitivity from 0.2 µm is required. The S03 covers 0.3 to 3.0 µm, while the S05 covers 0.5 to 20.0 µm. A lower minimum size is not automatically the best choice: the correct model depends on the target particle range, sample concentration, flow requirements, chemical properties, and the decisions that will be made from the data.

Data integration and lifecycle support in Vietnam

LiQuilaz II supports RS-485, 10/100Base-T Ethernet, and Modbus TCP communications. Depending on the application, PMS software such as FacilityNet™, FacilityPro®, or SamplerSight™ may support visualization, alarms, historical data review, sampler setup, and reporting. Exact capabilities depend on the licensed software and system architecture.

SAO NAM supports Particle Measuring Systems customers in Vietnam with application assessment, model and accessory selection, official equipment supply, installation guidance, operator training, calibration, preventive maintenance, and technical troubleshooting, depending on the supplied configuration, project scope, and service agreement. For a reliable quotation, provide the chemical name and concentration, target particle sizes, viscosity, temperature, pressure, flow conditions, sample volume, sampling method, and data-integration requirements.